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On-chip solar power source for self-powered smart microsensors in bulk CMOS process

Enhancing the photoelectric conversion efficiency of on-chip solar cells is crucial for advancing solar energy harvesting in self-powered smart microsensors for Internet of Things applications. Here we show that adopting a center electrode (CE) layout instead of a ring electrode (RE) effectively reduces the shadowing effect of surface electrodes. Using a standard 0.18 μm CMOS process, we fabricated a 0.01 mm² segmented triple-well on-chip solar cell with CEs and highly doped interconnections. Measurements demonstrate a photoelectric conversion efficiency of 25.79% under solar simulator illumination, a 17.49% improvement over conventional designs. This on-chip solar cell is used for on-chip energy harvesting, achieving a maximum end-to-end conversion efficiency of 10.20%, referring to the overall efficiency from incident light power to load power output. The proposed energy harvesting system reliably provides a stable 1 V output to the load, even under varying illumination and load conditions.

A gut-on-a-chip incorporating human faecal samples and peristalsis predicts responses to immune checkpoint inhibitors for melanoma

Patient responses to immune checkpoint inhibitors can be influenced by the gastrointestinal microbiome. Mouse models can be used to study microbiome–host crosstalk, yet their utility is constrained by substantial anatomical, functional, immunological and microbial differences between mice and humans. Here we show that a gut-on-a-chip system mimicking the architecture and functionality of the human intestine by including faecal microbiome and peristaltic-like movements recapitulates microbiome–host interactions and predicts responses to immune checkpoint inhibitors in patients with melanoma. The system is composed of a vascular channel seeded with human microvascular endothelial cells and an intestinal channel with intestinal organoids derived from human induced pluripotent stem cells, with the two channels separated by a collagen matrix. By incorporating faecal samples from patients with melanoma into the intestinal channel and by performing multiomic analyses, we uncovered epithelium-specific biomarkers and microbial factors that correlate with clinical outcomes in patients with melanoma and that the microbiome of non-responders has a reduced ability to buffer cellular stress and self-renew. The gut-on-a-chip model may help identify prognostic biomarkers and therapeutic targets.

Acoustic impedance-based surface acoustic wave chip for gas leak detection and respiratory monitoring

Acoustic impedance enables many interesting acoustic applications. However, acoustic impedance for gas sensing is rare and difficult. Here we introduce a micro-nano surface acoustic wave (SAW) chip based on the acoustic impedance effect to achieve ultra-fast and wide-range gas sensing. We theoretically established the relationship between surface load acoustic impedance and SAW attenuation, and analyzed the influence of acoustic impedance on acoustic propagation loss under different gas/humidity media. Experimental measurements reveal that the differences in acoustic impedance generated by different gases trigger different acoustic attenuation, and can achieve wide-range (0–100 v/v%) gas monitoring, with ultra-fast response and recovery speeds reaching sub-second levels (t90 < 1 s, t10 < 0.5 s) and detection limit of ~1 v/v%. This capability can also be perfectly utilized for human respiratory monitoring, accurately reflecting respiratory status, frequency, and intensity. Consequently, the SAW chip based on the acoustic impedance effect provides a new solution for in-situ detection of gas leaks and precise monitoring of human respiration.

Flexible micromachined ultrasound transducers (MUTs) for biomedical applications

The use of bulk piezoelectric transducer arrays in medical imaging is a well-established technology that operates based on thickness mode piezoelectric vibration. Meanwhile, advancements in fabrication techniques have led to the emergence of micromachined alternatives, namely, piezoelectric micromachined ultrasound transducer (PMUT) and capacitive micromachined ultrasound transducer (CMUT). These devices operate in flexural mode using piezoelectric thin films and electrostatic forces, respectively. In addition, the development of flexible ultrasound transducers based on these principles has opened up new possibilities for biomedical applications, including biomedical imaging, sensing, and stimulation. This review provides a detailed discussion of the need for flexible micromachined ultrasound transducers (MUTs) and potential applications, their specifications, materials, fabrication, and electronics integration. Specifically, the review covers fabrication approaches and compares the performance specifications of flexible PMUTs and CMUTs, including resonance frequency, sensitivity, flexibility, and other relevant factors. Finally, the review concludes with an outlook on the challenges and opportunities associated with the realization of efficient MUTs with high performance and flexibility.

Inverted pyramid 3-axis silicon Hall-effect magnetic sensor with offset cancellation

Microelectronic magnetic sensors are essential in diverse applications, including automotive, industrial, and consumer electronics. Hall-effect devices hold the largest share of the magnetic sensor market, and they are particularly valued for their reliability, low cost and CMOS compatibility. This paper introduces a novel 3-axis Hall-effect sensor element based on an inverted pyramid structure, realized by leveraging MEMS micromachining and CMOS processing. The devices are manufactured by etching the pyramid openings with TMAH and implanting the sloped walls with n-dopants to define the active area. Through the use of various bias-sense detection modes, the device is able to detect both in-plane and out-of-plane magnetic fields within a single compact structure. In addition, the offset can be significantly reduced by one to three orders of magnitude by employing the current-spinning method. The device presented in this work demonstrated high in-plane and out-of-plane current- and voltage-related sensitivities ranging between 64.1 to 198 V A−1 T1 and 14.8 to 21.4 mV V−1 T−1, with crosstalk below 4.7%. The sensor exhibits a thermal noise floor which corresponds to approximately (0.5,mu text{T}/sqrt{text{Hz}}) at 1.31 V supply. This novel Hall-effect sensor represents a promising and simpler alternative to existing state-of-the-art 3-axis magnetic sensors, offering a viable solution for precise and reliable magnetic field sensing in various applications such as position feedback and power monitoring.

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