Vernier microcombs for integrated optical atomic clocks
Kerr microcombs have drawn substantial interest as mass-manufacturable, compact alternatives to bulk frequency combs. This could enable the deploym…
Tag: Optical metrology
Near-field terahertz time-domain spectroscopy for in-line electrical metrology of semiconductor integration processes for memory
Monitoring electrical properties in semiconductor integration processes is crucial in identifying electrical defects that determine the reliability…